Illinois Plasma Institute
The Illinois Plasma Institute (IPI) is an initiative of the Grainger College of Engineering at the University of Illinois Urbana-Champaign. IPI’s founding was driven by a desire to rethink existing pathways to the commercialization of new technologies developed in academic research settings. Combining the best of both worlds, IPI provides a space where forward-thinking industrial partners can pair their own research and development staff with academic researchers closer to the underlying science behind a new technology. Working in concert on a shared platform, advances made it the laboratory may be implemented onto production-level equipment shortening the time to adoption in high-volume manufacturing.
Complementary to cooperation in the lab, assignees from industrial partners also find easy access to the College’s Masters of Engineering in Plasma Engineering, a professional Master’s program designed to prepare workers from a wide variety of technical fields for the unique opportunities that plasma processing has to offer.
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Congratulations to Professor Ruzic for his remarkable achievement in receiving the IUVSTA (The International Union for Vacuum Science, Technique and Applications) Prize for Technology! This prestigious award is only given out once every three years, one for technology and one for science. Not only does it require the support of a winner’s own society, but…
On Wednesday March 5, 2025, Jeremy Mettler held his final doctor defense in front of more than 30 people! Dr. Mettler’s thesis was titled “On the Development and Application of Etching-Based Fluorine Radical Probes”. In this PhD thesis, Jeremy investigates the critical role of fluorine chemistry in high aspect ratio silicon etching, a key process…
Several students, along with Professors Ruzic and Qerimi, went to San Jose, CA to attend the SPIE Advanced Lithography + Patterning conference at the San Jose McEnery Convention Center on February 22 – 26. The conference’s aim is to allow attendees to learn about new research and challenges in EUV lithography and patterning technologies as…
Master of Engineering in Plasma Engineering
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This non-thesis, 32-credit hour M.Eng. program provides an in-depth education in plasma processing, plasma technology, and plasma science. This masterʼs degree in Plasma Engineering is specifically designed for students looking to enter the industry upon graduation. The detailed curriculum, real-world experience, and laboratory experiences provided by this program equip graduates with the knowledge to utilize, understand, and innovate plasma-related applications delivering highly marketable skills that are in demand by employers across various industries.