Illinois Plasma Institute
The Illinois Plasma Institute (IPI) is an initiative of the Grainger College of Engineering at the University of Illinois Urbana-Champaign. IPI’s founding was driven by a desire to rethink existing pathways to the commercialization of new technologies developed in academic research settings. Combining the best of both worlds, IPI provides a space where forward-thinking industrial partners can pair their own research and development staff with academic researchers closer to the underlying science behind a new technology. Working in concert on a shared platform, advances made it the laboratory may be implemented onto production-level equipment shortening the time to adoption in high-volume manufacturing.
Complementary to cooperation in the lab, assignees from industrial partners also find easy access to the College’s Masters of Engineering in Plasma Engineering, a professional Master’s program designed to prepare workers from a wide variety of technical fields for the unique opportunities that plasma processing has to offer.
Research
Publications
People
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Plasma-Activated Water as a Sustainable Alternative for Semiconductor Cleaning: Christian Williams Defends PhD Thesis
The Illinois Plasma Institute and Research (IPI) is pleased to announce that graduate student Christian Williams has successfully defended his PhD thesis, marking a significant milestone for both the institute and the broader field of sustainable semiconductor manufacturing. Christian’s dissertation addresses one of the emerging challenges in chip fabrication: the accumulation of difficult-to-remove residues that result from…
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TEL CEO visits IPI
Last week we welcomed the CEO of Tokyo Electron Limited (TEL) to the Illinois Plasma Institute at the University of Illinois Urbana-Champaign. TEL is a long-standing partner of IPI, and our collaboration runs deep, from plasma etch and deposition process R&D to digital twin development for next-generation semiconductor manufacturing tools. Having leadership from one of…
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A successful week at AVS71 for IPI & CPMI
Last week, ten graduate students joined Professors Ruzic and Qerimi at AVS71 in Charlotte, North Carolina. Professors David Ruzic and Dren Qerimi and the students presented posters and gave talks showcasing the amazing research done through the two centers. Some of the talks and posters presented AVS included Tag Choi’s “Investigation of Temporal, Spatial and…
Master of Engineering in Plasma Engineering
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This non-thesis, 32-credit hour M.Eng. program provides an in-depth education in plasma processing, plasma technology, and plasma science. This masterʼs degree in Plasma Engineering is specifically designed for students looking to enter the industry upon graduation. The detailed curriculum, real-world experience, and laboratory experiences provided by this program equip graduates with the knowledge to utilize, understand, and innovate plasma-related applications delivering highly marketable skills that are in demand by employers across various industries.