IPI Associate Director Dren Qerimi attended the combined IEEE Pulsed Power & Plasma Scienced Conference and IEEE International Conference on Plasma Science in Berlin, Germany last month. The combined conferences covered topics in plasma science and engineering as well as in pulsed power science and technology.
Professor Qerimi gave a talk titled “University-scale Extreme Ultraviolet Lithography Source” that discussed and explored how cutting-edge EUV technology—an area that is usually reserved for industrial giants—can be reimagined and scaled for academic research environments.