Last week, ten graduate students joined Professors Ruzic and Qerimi at AVS71 in Charlotte, North Carolina. Professors David Ruzic and Dren Qerimi and the students presented posters and gave talks showcasing the amazing research done through the two centers. Some of the talks and posters presented AVS included Tag Choi’s “Investigation of Temporal, Spatial and […]
Congratulations to Tag Choi for being selected as one of five finalists for the 2025 Coburn and Winters (C&W) Student Award, presented by the Plasma Science and Technology Division (PSTD) of the American Vacuum Society (AVS). As a finalist, Tag will be awarded a cash prize and the opportunity to win the award for an […]
The SMART (Semiconductor Manufacturing and Advanced Research with Twins) USA Institute hosted their inaugural summit on June 26 and 27th in Arlington, Virginia. This summit was an opportunity for leaders within the industry, government, and academia to discuss the future of semiconductor manufacturing in America. Specifically, this summit focused on digital twin research, virtual replicas […]
IPI Associate Director Dren Qerimi attended the combined IEEE Pulsed Power & Plasma Scienced Conference and IEEE International Conference on Plasma Science in Berlin, Germany last month. The combined conferences covered topics in plasma science and engineering as well as in pulsed power science and technology. Professor Qerimi gave a talk titled “University-scale Extreme Ultraviolet […]
This June, IPI Director David Ruzic established the first named professorship of the NPRE department in honor of his parents, Neil and Carol Ruzic. This professorship will be put towards plasma-related faculty to continue to enhance the department’s mission in plasma engineering. You can more about the new professorship, its namesakes, and the vision for […]
IPI Associate Director Dren Qerimi traveled to Saudi Arabia in May to attend the “Future of Semiconductors Forum” for two days. This forum was put on by the King Abdullah University of Science and Technology (KAUST). Professor Qerimi had the opportunity to share IPI’s work on the in-house built EUV (Extreme Ultraviolet) source as well […]
Congratulations to Professor Ruzic for his remarkable achievement in receiving the IUVSTA (The International Union for Vacuum Science, Technique and Applications) Prize for Technology! This prestigious award is only given out once every three years, one for technology and one for science. Not only does it require the support of a winner’s own society, but […]
On Wednesday March 5, 2025, Jeremy Mettler held his final doctor defense in front of more than 30 people! Dr. Mettler’s thesis was titled “On the Development and Application of Etching-Based Fluorine Radical Probes”. In this PhD thesis, Jeremy investigates the critical role of fluorine chemistry in high aspect ratio silicon etching, a key process […]
Several students, along with Professors Ruzic and Qerimi, went to San Jose, CA to attend the SPIE Advanced Lithography + Patterning conference at the San Jose McEnery Convention Center on February 22 – 26. The conference’s aim is to allow attendees to learn about new research and challenges in EUV lithography and patterning technologies as […]
The teams from the Illinois Plasma Institute and CPMI, including professors David Ruzic and Dren Qerimi, and graduate students Jeremy Mettler, Tag Choi, Emily Greene, Parker Hays, Nick Connolly, and Zachary Jackell had the privilege of presenting their latest research at the 70th Annual American Vacuum Society Conference in Tampa, Florida. Held from November 3rd […]