Congratulations to Professor Ruzic for his remarkable achievement in receiving the IUVSTA (The International Union for Vacuum Science, Technique and Applications) Prize for Technology! This prestigious award is only given out once every three years, one for technology and one for science. Not only does it require the support of a winner’s own society, but […]
Author: Maryrose Patricia O'Donnell
Congratulations to Dr. Jeremy Mettler for his PhD!
On Wednesday March 5, 2025, Jeremy Mettler held his final doctor defense in front of more than 30 people! Dr. Mettler’s thesis was titled “On the Development and Application of Etching-Based Fluorine Radical Probes”. In this PhD thesis, Jeremy investigates the critical role of fluorine chemistry in high aspect ratio silicon etching, a key process […]
SPIE Advanced Lithography + Patterning 2025 Conference
Several students, along with Professors Ruzic and Qerimi, went to San Jose, CA to attend the SPIE Advanced Lithography + Patterning conference at the San Jose McEnery Convention Center on February 22 – 26. The conference’s aim is to allow attendees to learn about new research and challenges in EUV lithography and patterning technologies as […]
IPI and CPMI teams at the 70th Annual AVS Conference
The teams from the Illinois Plasma Institute and CPMI, including professors David Ruzic and Dren Qerimi, and graduate students Jeremy Mettler, Tag Choi, Emily Greene, Parker Hays, Nick Connolly, and Zachary Jackell had the privilege of presenting their latest research at the 70th Annual American Vacuum Society Conference in Tampa, Florida. Held from November 3rd […]