The Illinois Plasma Institute and Research (IPI) is pleased to announce that graduate student Christian Williams has successfully defended his PhD thesis, marking a significant milestone for both the institute and the broader field of sustainable semiconductor manufacturing. Christian’s dissertation addresses one of the emerging challenges in chip fabrication: the accumulation of difficult-to-remove residues that result from […]
Category: News
TEL CEO visits IPI
Last week we welcomed the CEO of Tokyo Electron Limited (TEL) to the Illinois Plasma Institute at the University of Illinois Urbana-Champaign. TEL is a long-standing partner of IPI, and our collaboration runs deep, from plasma etch and deposition process R&D to digital twin development for next-generation semiconductor manufacturing tools. Having leadership from one of […]
A successful week at AVS71 for IPI & CPMI
Last week, ten graduate students joined Professors Ruzic and Qerimi at AVS71 in Charlotte, North Carolina. Professors David Ruzic and Dren Qerimi and the students presented posters and gave talks showcasing the amazing research done through the two centers. Some of the talks and posters presented AVS included Tag Choi’s “Investigation of Temporal, Spatial and […]
Prof. Qerimi awarded Young Investigator Award from American Vacuum Society (AVS)
In a recent announcement from the American Vacuum Society (AVS), Research Assistant Professor Dren Qerimi of the Nuclear, Plasma, and Radiological Engineering (NPRE) department has been honored with the AVS Plasma Science and Technology Division’s Young Investigator Award. The AVS conference took place this week in Charlotte, NC. The prestigious accolade recognizes his significant contributions […]
Tag Choi awarded as a finalist for AVS Student Award
Congratulations to Tag Choi for being selected as one of five finalists for the 2025 Coburn and Winters (C&W) Student Award, presented by the Plasma Science and Technology Division (PSTD) of the American Vacuum Society (AVS). As a finalist, Tag will be awarded a cash prize and the opportunity to win the award for an […]
IPI Associate Director participates in the inaugural SMART USA Summit
The SMART (Semiconductor Manufacturing and Advanced Research with Twins) USA Institute hosted their inaugural summit on June 26 and 27th in Arlington, Virginia. This summit was an opportunity for leaders within the industry, government, and academia to discuss the future of semiconductor manufacturing in America. Specifically, this summit focused on digital twin research, virtual replicas […]
IPI represented at the PPPS 2025 Conference in Berlin
IPI Associate Director Dren Qerimi attended the combined IEEE Pulsed Power & Plasma Scienced Conference and IEEE International Conference on Plasma Science in Berlin, Germany last month. The combined conferences covered topics in plasma science and engineering as well as in pulsed power science and technology. Professor Qerimi gave a talk titled “University-scale Extreme Ultraviolet […]
Neil and Carol Ruzic Professorship established
This June, IPI Director David Ruzic established the first named professorship of the NPRE department in honor of his parents, Neil and Carol Ruzic. This professorship will be put towards plasma-related faculty to continue to enhance the department’s mission in plasma engineering. You can more about the new professorship, its namesakes, and the vision for […]
IPI Associate Director participates in the Future of Semiconductors Forum
IPI Associate Director Dren Qerimi traveled to Saudi Arabia in May to attend the “Future of Semiconductors Forum” for two days. This forum was put on by the King Abdullah University of Science and Technology (KAUST). Professor Qerimi had the opportunity to share IPI’s work on the in-house built EUV (Extreme Ultraviolet) source as well […]
Professor David Ruzic wins the IUVSTA Prize for Technology
Congratulations to Professor Ruzic for his remarkable achievement in receiving the IUVSTA (The International Union for Vacuum Science, Technique and Applications) Prize for Technology! This prestigious award is only given out once every three years, one for technology and one for science. Not only does it require the support of a winner’s own society, but […]