On Wednesday March 5, 2025, Jeremy Mettler held his final doctor defense in front of more than 30 people! Dr. Mettler’s thesis was titled “On the Development and Application of Etching-Based Fluorine Radical Probes”. In this PhD thesis, Jeremy investigates the critical role of fluorine chemistry in high aspect ratio silicon etching, a key process […]
Several students, along with Professors Ruzic and Qerimi, went to San Jose, CA to attend the SPIE Advanced Lithography + Patterning conference at the San Jose McEnery Convention Center on February 22 – 26. The conference’s aim is to allow attendees to learn about new research and challenges in EUV lithography and patterning technologies as […]
The teams from the Illinois Plasma Institute and CPMI, including professors David Ruzic and Dren Qerimi, and graduate students Jeremy Mettler, Tag Choi, Emily Greene, Parker Hays, Nick Connolly, and Zachary Jackell had the privilege of presenting their latest research at the 70th Annual American Vacuum Society Conference in Tampa, Florida. Held from November 3rd […]
“The first time I met Dave was in 2008 when I interviewed for a position at UIUC (which I didn’t get, but that’s for another story). Before that, I only knew that he works on plasma/fusion, and nothing else. When we met, it was quickly apparent I was standing in front of a charismatic, enthusiastic, […]
Jeremy Jacob Harry Mettler, a Ph.D. candidate at NPRE/IPI, has successfully passed the preliminary exam on his research on etching-based fluorine radical probes. Mettler’s work focuses on developing and applying novel radical probe designs to achieve spatially resolved measurements of fluorine density in plasma systems, a critical factor in reactive ion etching (RIE) processes. His […]
Illinois Plasma Institute graduate student Christian Williams successfully defended his preliminary exam titled “Plasma-Activated Liquids with Applications to the Semiconductor Industry using the Integrated circuit Manufacturing with Plasma Activated Chemical Treatment (IMPACT) Tool.” This work investigates the potential of atmospheric plasma treatment of a liquid (TMAH) used in semiconductor manufacturing for etching and lithography processes. […]
A focused degree that equips you to lead in semiconductor manufacturing, industrial plasmas, nuclear fusion, and more. Finding solutions to current and future processing challenges requires a mastery of the core concepts of plasma engineering as well as topical depth in a professional focus area. The M.Eng. in Plasma Engineering is a professionally-oriented masterʼs degree from The […]
IPI Associate Director Dren Qerimi and Professor G. Girolami visited TOK Japan to present their findings and explore further collaboration in transforming novel scientific ideas into products that will empower the semiconductor industry. Additionally, Professor D. Qerimi visited Ebara to discuss the potential of adding Ebara as an IPI partner.
Join us as we celebrate and thank David for his 40 years of service to the Department of Nuclear, Plasma & Radiological Engineering and the University of Illinois Urbana-Champaign. May 2, 2024 | 2:00 – 3:00 p.m.Talbot Lounge (Room 220)
NPRE professor David Ruzic and his Illinois Plasma Institute have been featured in the Fall 2023 issue of Limitless, The Grainger College of Engineering‘s biannual magazine. In the article, Ruzic talks about IPI’s mission to “rethink existing pathways to commercialization of new technologies developed in academic research settings.” Read the story here: https://grainger.illinois.edu/…/illinois-plasma-institute