-
Plasma-Activated Water as a Sustainable Alternative for Semiconductor Cleaning: Christian Williams Defends PhD Thesis
The Illinois Plasma Institute and Research (IPI) is pleased to announce that graduate student Christian Williams has successfully defended his PhD thesis, marking a significant milestone for both the institute and the broader field of sustainable semiconductor manufacturing. Christian’s dissertation addresses one of the emerging challenges in chip fabrication: the accumulation of difficult-to-remove residues that result from…
-
TEL CEO visits IPI
Last week we welcomed the CEO of Tokyo Electron Limited (TEL) to the Illinois Plasma Institute at the University of Illinois Urbana-Champaign. TEL is a long-standing partner of IPI, and our collaboration runs deep, from plasma etch and deposition process R&D to digital twin development for next-generation semiconductor manufacturing tools. Having leadership from one of…
-
A successful week at AVS71 for IPI & CPMI
Last week, ten graduate students joined Professors Ruzic and Qerimi at AVS71 in Charlotte, North Carolina. Professors David Ruzic and Dren Qerimi and the students presented posters and gave talks showcasing the amazing research done through the two centers. Some of the talks and posters presented AVS included Tag Choi’s “Investigation of Temporal, Spatial and…