Institute Director
David Ruzic
druzic@illinois.edu
(217) 333-0332
Associate Director, Research Assistant Professor
Dren Qerimi
dqerimi@illinois.edu
(779) 875-9679
Faculty Members
Daniel Andruczyk
andruczy@illinois.edu
(217) 333-1750
Davide Curreli
dcurreli@illinois.edu
(217) 300-1787
R. Mohan Sankaran
rmohan@illinois.edu
(217) 244-7316
Company Assignees
Tokyo Electron Ltd
Takashi Tohara
takashi.tohara@tel.com
Tokyo Ohka Kogyo Co., Ltd.
Akira Matsuyama
akiram2@illinois.edu
Eita Suga
eita.suga@tokamerica.com
LytEn, Inc
Bruce Gittleman
bruce.gittleman@lyten.com
Michael Stowell
michael.stowell@lyten.com
Oleg Grachev
Oleg.Grachev@lyten.com
Masters of Engineering in Plasma Engineering
Daniel Eugene Jacobson
dej3@illinois.edu
Lauren Ann Sienko
lsienko2@illinois.edu
Yusuke Shibuta
Yusuke.Shibuta@tokamerica.com
Casey Welton
Casey.Welton@lyten.com
Graduate Students
Tag Choi
tchoi23@illinois.edu
Dhruval Kamlesh Patel
dkpatel3@illinois.edu
Christian Williams
cdw4@illinois.edu
Jeremy Mettler
jmettle2@illinois.edu
Jan Uhlig
juhlig2@illinois.edu
Affiliate Faculty Members
J. Gary Eden
jgeden@illinois.edu
(217) 333-4157
Xiuling Li
xiulingli@illinois.edu
(217) 265-6354
Dane Sievers
dsievers@illinois.edu
(217) 333-8249
Lynford Goddard
lgoddard@illinois.edu
(217) 244-0799
Andrey Miranov
amirono2@illinois.edu
(217) 550-8185
Adjunct Faculty
Brian E. Jurczyk
bjurczyk@starfireindustries.com
Robert Stubbers
rstubbers@starfireindustries.com
Michael Stowell
michael.stowell@lyten.com
Consultants
Phi Nguyen
PLN Consulting
plnconsulting123@gmail.com