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Illinois Plasma Institute                                 

Research

Photo-Resistent Development

General Information: One of the most important properties of any process step in semiconductor manufacturing is the ability to maintain extremely high levels of uniformity. This work is focused on the assurance of uniform distribution of the raw material in a photoresist film. Homogeneity plays a key role in these films because as companies move towards smaller and smaller feature printing sizes, the compounds present at different locations in the film determine the reactions which occur. :

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Project 3

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